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Galileo Galilei constructed a compound microscope with a convex and concave lens
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Anton van Leeuwenhoek makes a microscope for viewing biological specimens
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John Marshal develops a microscope base with an illumination system
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Ernst Abbe discovers the Abbe sine condition/ improves microscope design
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Ernst Ruska starts to build the first electron microscope
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Erwin Wihelm Muller invents field emission microscope
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Erwin Wihelm Muller invents the field ion microscope and is the first to see atoms
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Erwin Wihelm Muller adds time-of-flight spectroscopy to the field ion microscope
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Kelvin probe force microscope is invented