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The first microsystems research starts in the original Durham cleanroom -
Mike Petty and David Wood had the join their organic electronics and microsystems groups to apply for funding of a joint facility -
Building work starts on the new cleanroom and Durham County Council and ONENE invest in equipment and projects to help the local economy -
The Level 4 Molecular Electronics and Microsystems (MEMS) opens -
Sir David King returns for a second visit to look how the money invested has allowed growth in the area -
A wolfson funded grant allows a further extension of the cleanroom to allow introduction of a range of new equipment (including an RIE / Sputter System / Test equipment)
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Continued growth during this period led to a number of collaborations inc. ViperRF, Labman, Newcastle University IBEX.
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University funding lead to the addition of a e-beam lithography system, an atomic layer deposition system and a cluster deposition system comprising both e-beam and sputter deposition capabilities.
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Work with Northumrbria University, Oxford university, Senstronics, The Scottish Microelectronics Centre and Pragmatic Printing all helped firm up the facilities position at the forefront of delivering on device fabrication projects.
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In 2020, the world changed with the global pandemic. However, despite significant complexity, the labs were kept accessible at a low level to allow research work to continue
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Investment and upgrade was made of all the LEV systems relating to the lab, to extend its lifetime going forwards
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While down time caused many issues, the cleanroom and associated labs are now back to deliver on those projects and collaborations.