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Isaac Asimov formulated the three laws of robotics.
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Norbert Wiener formulated the principals of cybernetics.
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George Devol created the first digitally operated and programable robot arm. It was used to lift hot peices of metal from a die casting machine and stack them.
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The lunokhod 1 was the first roving remote-controlled robot to land on another planet. It was equip with cameras, laser devices, x-ray devices and extenable devices to test the moons soil.
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Kuka built the worlds first industrial robot wth six electromechanically driven axes