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Used vacuum tubes,it used to carry data and in the form of electronic signals, its very large, expensive and requiered huge amounts of elecrtricity.
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Used transistors, its smaller, faster and cheaper and more energy efficient.
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Used silicon chips, increased the speed, efficiency of computers and allowed to used many differents applicatopns at thye same time and its faster and cheaper.
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Used microprocessors, more powerful and produced less energy
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Used parallel processing and superconductors, is helping to make artifficial inteligence.